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Electron Beam Gun
A four-pocket, 8 kW source (Temescal Model ST1H-270-1) is used for electron beam evaporations. This system provides the capability for the evaporation of high melting point materials. The source has a rotating turret containing four crucibles, which enable multiple evaporations to be performed. The electron beam gun (e-gun) is installed on a custom designed mounting and housed within a high vacuum chamber pumped by an Air Products Model CSW-202 cryopump.
Photograph of electron-beam source showing turret for multiple evaporations.
Films prepared with the modified electron gun:
E |
I |
Imag |
Rate |
Substrate |
T |
Comments/Remarks |
|
(kV) |
(mA) |
(A) |
(ug/cm2/s) |
(K) |
|||
Zr |
10 |
160 |
|||||
W |
9.8 |
115 |
Quarts disks |
Laser mirrors |
|||
NaCl |
5.5 |
10 |
-0.34 |
13.0 |
Glass slides |
Release agent |
|
Cr |
6 |
16 |
Pd disks |
Cold fusion exp. |
|||
Mo |
10 |
90 |
-0.95 |
11.1 |
Glass slides |
623 |
|
C |
10 |
70 |
-0.81 |
6.3 |
Glass slides |
Backing foil |
|
Au |
10 |
20 |
-0.96 |
80 |
|||
BaCl2 |
5.2 |
20 |
8 |
Glass slides |
Release agent |
||
Y |
8 |
30 |
-0.71 |
9 |
|||
CsI |
5 |
9 |
-0.37 |
Glass slides |
|||
Gd |
10 |
40 |
23 |
Stretched Au |
|||
Fe |
10 |
25 |
-0.75 |
3.6 |
C foils |
40 ug/cm2_20 ug/cm-2C |
|
Nd |
10 |
23 |
-0.77 |
1.34 |
Collodion |
||
Pt |
10 |
85 |
-0.71 |
3.0 |
C foils |
30 ug/cm2 C “spot” targets |
|
Os |
10 |
37 |
-0.75 |
2.2 |
C foils |
30 ug/cm2 C “spot” targets |
G.E. Thomas and J.P. Greene, Nucl. Instr. and Meth. A282(1991), p.161-164
